Effect of Fe and Cu contamination on the reliability of ultrathin gate oxides.
| Autor: | D'Amico, John, Jastrzebski, Lubek, Wilson, Marshall, Savtchouk, Alexandre |
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| Zdroj: | Proceedings of SPIE; Nov1999, Issue 1, p124-135, 12p |
| Databáze: | Complementary Index |
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