Physical and electrical properties of thin dielectrics prepared by photoassisted growth in an NO environment.
| Autor: | Jamet, Phillipe, Harrison, H. Barry, Dimitrijev, Sima, Tanner, Philip G. |
|---|---|
| Zdroj: | Proceedings of SPIE; Nov1999, Issue 1, p298-305, 8p |
| Databáze: | Complementary Index |
| Externí odkaz: |
|