Modeling of the optical torsion micromirror.
Autor: | Zhang, Xuming, Chau, Fook S., Quan, Chenggen, Liu, Ai Q. |
---|---|
Zdroj: | Proceedings of SPIE; Nov1999, Issue 1, p109-116, 8p |
Databáze: | Complementary Index |
Externí odkaz: |
Autor: | Zhang, Xuming, Chau, Fook S., Quan, Chenggen, Liu, Ai Q. |
---|---|
Zdroj: | Proceedings of SPIE; Nov1999, Issue 1, p109-116, 8p |
Databáze: | Complementary Index |
Externí odkaz: |