Optical characterization methods of InP-based micro-opto-electro-mechanical systems.
| Autor: | Le Dantec, Ronan, Benyattou, Taha, Guillot, Gerard, Seassal, Christian, Leclercq, Jean Louis, Letartre, Xavier, Gagnaire, A., Gendry, Michel, Viktorovitch, Pierre, Benferhat, Ramdane, Rondi, D., Blondeau, Robert R. |
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| Zdroj: | Proceedings of SPIE; Nov1997, Issue 1, p258-264, 7p |
| Databáze: | Complementary Index |
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