Fabrication of large-area gratings with submicron pitch using mold micromachining.
Autor: | Fleming, James G., Craig Barron, Carole, Stallard, Brian R., Kaushik, Sumanth |
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Zdroj: | Proceedings of SPIE; Nov1997, Issue 1, p7-14, 8p |
Databáze: | Complementary Index |
Externí odkaz: |