Processing parameter optimization for thermochemical writing of DOEs on chromium films.
| Autor: | Cherkashin, Vadim V., Churin, Evgeny G., Korolkov, Victor P., Koronkevich, Voldemar P., Kharissov, Andrey A., Poleshchuk, Alexander G., Burge, James H. |
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| Zdroj: | Proceedings of SPIE; Nov1997, Issue 1, p168-179, 12p |
| Databáze: | Complementary Index |
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