Enhanced hydrogenation in polycrystalline Si thin films using ultrasound treatment.
| Autor: | Ostapenko, Sergei, Koshka, Yaroslav, Jastrzebski, Lubek, Smeltzer, Ronald K. |
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| Zdroj: | Proceedings of SPIE; Nov1997, Issue 1, p176-183, 8p |
| Databáze: | Complementary Index |
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