Conducting polyaniline coatings for submicron lithography and SEM metrology.
| Autor: | Graham, Teresita O., Angelopoulos, Marie, Furman, Bruce, Chen, K. Rex, Moreau, Wayne M. |
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| Zdroj: | Proceedings of SPIE; Nov1997, Issue 1, p105-113, 9p |
| Databáze: | Complementary Index |
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