Method to improve setup and overlay performance on an excimer laser stepper using a unique DUV resist: KRS.
| Autor: | Petrillo, Karen E., Brancaccio, James, Huang, Wu-Song, Kwong, Ranee W., Katnani, Ahmad D. |
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| Zdroj: | Proceedings of SPIE; Nov1997, Issue 1, p319-328, 10p |
| Databáze: | Complementary Index |
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