Measurement of mid-spatial-frequency scatter in extreme ultraviolet lithography systems using direct aerial image measurements.
| Autor: | Fields, Charles H., Ray-Chaudhuri, Avijit K., Krenz, Kevin D., Oldham, William G., Stulen, Richard H. |
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| Zdroj: | Proceedings of SPIE; Nov1997, Issue 1, p356-367, 12p |
| Databáze: | Complementary Index |
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