Probing the environmental stability and bake latitudes of acetal vs. ketal protected polyvinylphenol DUV resist systems.
| Autor: | Kumar, Uday, Pandya, Ashish, Sinta, Roger F., Huang, Wu-Song, Bantu, Rao, Katnani, Ahmad D. |
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| Zdroj: | Proceedings of SPIE; Nov1997, Issue 1, p135-145, 11p |
| Databáze: | Complementary Index |
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