Characterization and optimization of positive-tone DUV resists on TiN substrates.
| Autor: | Zandbergen, Peter, Gehoel-van Ansem, Wendy F., Vandenberghe, Geert, Van Driessche, Veerle, Vloeberghs, Hans |
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| Zdroj: | Proceedings of SPIE; Nov1997, Issue 1, p314-323, 10p |
| Databáze: | Complementary Index |
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