Dissolution promotion in novolac-diazoquinone resists.
| Autor: | Shih, Hsiao-Yi, Reiser, Arnost |
|---|---|
| Zdroj: | Proceedings of SPIE; Nov1997, Issue 1, p340-344, 5p |
| Databáze: | Complementary Index |
| Externí odkaz: |
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| Autor: | Shih, Hsiao-Yi, Reiser, Arnost |
|---|---|
| Zdroj: | Proceedings of SPIE; Nov1997, Issue 1, p340-344, 5p |
| Databáze: | Complementary Index |
| Externí odkaz: |
|