Effects of crosslinking agent on lithographic performance of negative-tone resists based on poly(p-hydroxystyrene).
| Autor: | Lin, Qinghuang, Katnani, Ahmad D., Willson, C. Grant |
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| Zdroj: | Proceedings of SPIE; Nov1997, Issue 1, p974-987, 14p |
| Databáze: | Complementary Index |
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