Challenge of 1-Gb DRAM development when using optical lithography.
| Autor: | Farrell, Timothy R., Nunes, Ronald, Samuels, Donald J., Thomas, Alan C., Ferguson, Richard A., Molless, Antoinette F., Wong, Alfred K. K., Conley, Will, Wheeler, Donald C., Credendino, Santo, Naeem, Munir, Hoh, Peter, Lu, Zhijian G. |
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| Zdroj: | Proceedings of SPIE; Nov1997, Issue 1, p333-341, 9p |
| Databáze: | Complementary Index |
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