Micrascan III: performance of a third-generation catadioptric step-and-scan lithographic tool.
| Autor: | Cote, Daniel R., Andresen, Keith W., Cronin, David J., Harrold, Hilary G., Himel, Marc D., Kane, J., Lyons, Joe, Markoya, Louis, Mason, Christopher J., McCafferty, Diane C., McCarthy, Matthew E., O'Connor, Geoffrey, Sewell, Harry, Williamson, David M. |
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| Zdroj: | Proceedings of SPIE; Nov1997, Issue 1, p806-816, 11p |
| Databáze: | Complementary Index |
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