Etching of organic optical materials by photo-material processing using an excimer lamp.
| Autor: | Yokotani, Atsushi, Takezoe, Noritaka, Kurosawa, Kou, Sasaki, Wataru, Igarashi, Tatsushi, Matsuno, Hiromitsu, Yoshida, Kunio, Sasaki, Takatomo |
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| Zdroj: | Proceedings of SPIE; Nov1997, Issue 1, p394-397, 4p |
| Databáze: | Complementary Index |
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