Deposition of diamondlike carbon films using XeCl excimer laser.
Autor: | Wei, Mao-Kuo, Queitsch, Robert, Lang, Adolf, Schutte, Karsten, Bergmann, Hans W. |
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Zdroj: | Proceedings of SPIE; Nov1997, Issue 1, p477-480, 4p |
Databáze: | Complementary Index |
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