Comparison of the precision of a null-ellipsometer to an ellipsometer with a rotating analyzer.
| Autor: | Bortchagovsky, Eugene G., Getsko, O. M. |
|---|---|
| Zdroj: | Proceedings of SPIE; Nov1997, Issue 1, p272-275, 4p |
| Databáze: | Complementary Index |
| Externí odkaz: |
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| Autor: | Bortchagovsky, Eugene G., Getsko, O. M. |
|---|---|
| Zdroj: | Proceedings of SPIE; Nov1997, Issue 1, p272-275, 4p |
| Databáze: | Complementary Index |
| Externí odkaz: |
|