Progress in silicon-to-silicon direct bonding and its application to synchrotron x-ray optics.
| Autor: | Graber, Timothy, Krasnicki, S. F., Fernandez, Patricia B., Mills, Dennis M., Tong, Qin-Yi, Goesele, Ulrich M. |
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| Zdroj: | Proceedings of SPIE; Nov1997, Issue 1, p54-64, 11p |
| Databáze: | Complementary Index |
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