Nature of distortions of the surface pattern produced by precise electron-beam processing of insulators.
| Autor: | Filachev, Anatoly M., Fouks, Boris I., Greenfeld, Dmitrii E. |
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| Zdroj: | Proceedings of SPIE; Nov1997, Issue 1, p78-88, 11p |
| Databáze: | Complementary Index |
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