X-ray micromachining of deep 3D terahertz waveguide components using a laser plasma source at 1-nm wavelength.
| Autor: | Turcu, I. C. Edmond, Mann, Chris M., Moon, Sung W., Maddison, B. J., Allott, Ric M., Lisi, Nicola, Huq, Syed E., Kim, Nam Seong |
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| Zdroj: | Proceedings of SPIE; Nov1997, Issue 1, p291-299, 9p |
| Databáze: | Complementary Index |
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