Characteristics of BaxSr1-xTiO3 thin films by metallorganic chemical vapor deposition for ultrahigh-density DRAM application.
| Autor: | Min, Bigang, Roh, Jaesung S., Yan, J., Kwong, Dim-Lee |
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| Zdroj: | Proceedings of SPIE; Nov1997, Issue 1, p360-367, 8p |
| Databáze: | Complementary Index |
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