Narrow-channel transistor threshold self-adjustment technique for ULSI with LOCOS isolation.
| Autor: | Loiko, Konstantin V., Peidous, Igor V., Ho, Hok-Min, Bromley-Barratt, John F., Quek, Elgin T., Lim, David H. Y. |
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| Zdroj: | Proceedings of SPIE; Nov1997, Issue 1, p383-385, 3p |
| Databáze: | Complementary Index |
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