Implementation of in-line Fowler-Nordheim testing for tunnel oxide thickness determination in manufacturing.
| Autor: | John, Laura D., Cosway, Richard G., Griswold, Mark D., Lamb, Gerald M. |
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| Zdroj: | Proceedings of SPIE; Nov1997, Issue 1, p94-100, 7p |
| Databáze: | Complementary Index |
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