Novel alternating phase-shift mask with improved phase accuracy.
| Autor: | Ishiwata, Naoyuki, Kobayashi, Takema, Asai, Satoru, Hanyu, Isamu |
|---|---|
| Zdroj: | Proceedings of SPIE; Nov1997, Issue 1, p243-249, 7p |
| Databáze: | Complementary Index |
| Externí odkaz: |
|
| Autor: | Ishiwata, Naoyuki, Kobayashi, Takema, Asai, Satoru, Hanyu, Isamu |
|---|---|
| Zdroj: | Proceedings of SPIE; Nov1997, Issue 1, p243-249, 7p |
| Databáze: | Complementary Index |
| Externí odkaz: |
|