Process monitoring and control of integrated-circuit manufacturing using Fourier transform infrared spectroscopy.
| Autor: | Liu, Shaohua, Haigis, John R., DiTaranto, Marie B., Kinsella, Karen, Markham, James R., Li, Qi, Fenner, David B., Solomon, Peter R., Farquharson, Stuart, Morrison Jr., Philip W. |
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| Zdroj: | Proceedings of SPIE; Nov1995, Issue 1, p171-182, 12p |
| Databáze: | Complementary Index |
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