Replicating characteristics by SR lithography.
| Autor: | Sumitani, Hiroaki, Itoga, Kenji, Inoue, Masami, Watanabe, Hiroshi, Yamamoto, Norikazu, Marumoto, Kenji, Matsui, Yasuji |
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| Zdroj: | Proceedings of SPIE; Nov1995, Issue 1, p94-103, 10p |
| Databáze: | Complementary Index |
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