Near and sub-half-micrometer geometry SEM metrology requirements for good process control.
| Autor: | Cork, Christopher M., Canestrari, Paolo, De Natale, Paolo, Vasconi, Mauro |
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| Zdroj: | Proceedings of SPIE; Nov1995, Issue 1, p106-113, 8p |
| Databáze: | Complementary Index |
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