Metrology of etched quartz and chrome embedded phase shift gratings using scatterometry.
| Autor: | Wilson, Susan M., Naqvi, S. Sohail H., McNeil, John R., Marchman, Herschel M., Johs, Blaine D., French, Roger H., Kalk, Franklin D. |
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| Zdroj: | Proceedings of SPIE; Nov1995, Issue 1, p479-494, 16p |
| Databáze: | Complementary Index |
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