0.35-um i-line poly processing with a bottom antireflective coating (BARC).
Autor: | Krisa, William L., Garza Sr., Cesar M., McKee, J. A. |
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Zdroj: | Proceedings of SPIE; Nov1995, Issue 1, p609-618, 10p |
Databáze: | Complementary Index |
Externí odkaz: |
Autor: | Krisa, William L., Garza Sr., Cesar M., McKee, J. A. |
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Zdroj: | Proceedings of SPIE; Nov1995, Issue 1, p609-618, 10p |
Databáze: | Complementary Index |
Externí odkaz: |