Mask-holding mechanism for an e-beam x-ray mask writer.
| Autor: | Kunioka, Tatsuya, Shimazu, Nobuo, Shimizu, Akira, Sakai, Tomoaki, Kuriyama, Youichi |
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| Zdroj: | Proceedings of SPIE; Nov1995, Issue 1, p130-141, 12p |
| Databáze: | Complementary Index |
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