Die-to-database defect detection for reticles of 64- and 256-Mbit DRAMs.
| Autor: | Eran, Yair, Greenberg, Gad, Rossman, Gideon |
|---|---|
| Zdroj: | Proceedings of SPIE; Nov1995, Issue 1, p453-456, 4p |
| Databáze: | Complementary Index |
| Externí odkaz: |
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| Autor: | Eran, Yair, Greenberg, Gad, Rossman, Gideon |
|---|---|
| Zdroj: | Proceedings of SPIE; Nov1995, Issue 1, p453-456, 4p |
| Databáze: | Complementary Index |
| Externí odkaz: |
|