Fabrication of multilayer optics by sputtering: application to EUV optics with greater than 30% normal reflectance.
| Autor: | Peters, Palmer N., Hoover, Richard B., Watts, Richard N., Tarrio, Charles, Walker Jr., Arthur B. C. |
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| Zdroj: | Proceedings of SPIE; Nov1995, Issue 1, p576-581, 6p |
| Databáze: | Complementary Index |
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