Evolution of the Si-SiO2 interface characteristics due to preoxidation texturing of silicon surface.
| Autor: | Gorban, Anatoliy P., Didenko, Pyotr I., Kostylyov, Vitaliy P., Litovchenko, Vladimir G., Nikolin, Igor B., Romanova, Galina P., Serba, Alexandr A., Chernenko, Vladimir V. |
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| Zdroj: | Proceedings of SPIE; Nov1995, Issue 1, p236-241, 6p |
| Databáze: | Complementary Index |
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