Material processing and advanced well structures using high-energy implantation for EPI replacement.
| Autor: | Wristers, Dirk, Eiting, Chris, Morris, Wes, Kwong, Dim-Lee, Fulford, Jim |
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| Zdroj: | Proceedings of SPIE; Nov1995, Issue 1, p234-245, 12p |
| Databáze: | Complementary Index |
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