Integration of BaxSr1-xTiO3 thin film for DRAM application.
| Autor: | Kashihara, Keiichiro, Okudaira, Tomonori, Tsunemine, Yoshikazu, Ohno, Yoshikazu, Itoh, Hiromi, Nishimura, Tadashi, Hirayama, Makoto, Horikawa, Tsuyoshi, Shibano, Teruo, Horie, Kazuo |
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| Zdroj: | Proceedings of SPIE; Nov1995, Issue 1, p134-142, 9p |
| Databáze: | Complementary Index |
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