In-line LOCOS active width characterization using surface SEM.
| Autor: | Madan, Sudhir K., Holloway, Tom |
|---|---|
| Zdroj: | Proceedings of SPIE; Nov1995, Issue 1, p52-59, 8p |
| Databáze: | Complementary Index |
| Externí odkaz: |
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| Autor: | Madan, Sudhir K., Holloway, Tom |
|---|---|
| Zdroj: | Proceedings of SPIE; Nov1995, Issue 1, p52-59, 8p |
| Databáze: | Complementary Index |
| Externí odkaz: |
|