Thin metal film thermal microsensors.
Autor: | Vladimirsky, Yuli, Rau, N., Manohara, Harish M., Morris, Kevin J., Klopf, J. Michael, Calderon, Gina M., Vladimirsky, Olga |
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Zdroj: | Proceedings of SPIE; Nov1995, Issue 1, p184-192, 9p |
Databáze: | Complementary Index |
Externí odkaz: |