Robust and environmentally stable deep UV positive resist: optimization of SUCCESS ST2.
| Autor: | Schwalm, Reinhold, Binder, H., Fischer, Thomas, Funhoff, Dirk J. H., Goethals, Anne-Marie, Grassmann, Andreas, Moritz, Holger, Paniez, Patrick J., Reuhman-Huisken, Marijan E., Vinet, Francoise, Dijkstra, Han J., Krause, A. |
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| Zdroj: | Proceedings of SPIE; 11/ 1/1994, Issue 1, p2-13, 12p |
| Databáze: | Complementary Index |
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