Some image modeling issues for I-line, 5X phase-shifting masks.
| Autor: | Wojcik, Gregory L., Mould Jr., John, Ferguson, Richard A., Martino, Ronald M., Low, K. K. |
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| Zdroj: | Proceedings of SPIE; 11/ 1/1994, Issue 1, p455-465, 11p |
| Databáze: | Complementary Index |
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