Optimization of optical properties for single-layer halftone masks.
| Autor: | Ito, Shinichi, Hazama, Hiroaki, Kamo, Takashi, Miyazaki, Hideya, Sato, Hiroyuki, Hayashi, Kenji, Shigemitsu, Fumiaki, Mori, Ichiro |
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| Zdroj: | Proceedings of SPIE; 11/ 1/1994, Issue 1, p99-110, 12p |
| Databáze: | Complementary Index |
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