Advanced laser driver for soft x-ray projection lithography.
| Autor: | Zapata, Luis E., Beach, Raymond J., Dane, C. Brent, Reichert, Patrick, Honig, John N., Hackel, Lloyd A. |
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| Zdroj: | Proceedings of SPIE; 11/ 1/1994, Issue 1, p499-507, 9p |
| Databáze: | Complementary Index |
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