Structural properties of Si1-xGex layers grown onto crystalline or amorphous substrates by pulsed excimer laser annealing of Ge implanted silicon.
| Autor: | Repplinger, Florence, Fogarassy, Eric, Grob, Adriana, Grob, Jean-Jacques, Prevot, Bernard, Stoquert, Jean-Paul, de Unamuno, Salome |
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| Zdroj: | Proceedings of SPIE; 11/ 1/1994, Issue 1, p652-658, 7p |
| Databáze: | Complementary Index |
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