Novel defect inspection method for the LSI mask pattern data.
| Autor: | Miyauchi, Touru, Kobayashi, Kenichi, Shigematsu, Kazumasa |
|---|---|
| Zdroj: | Proceedings of SPIE; 11/ 1/1994, Issue 1, p412-419, 8p |
| Databáze: | Complementary Index |
| Externí odkaz: |
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| Autor: | Miyauchi, Touru, Kobayashi, Kenichi, Shigematsu, Kazumasa |
|---|---|
| Zdroj: | Proceedings of SPIE; 11/ 1/1994, Issue 1, p412-419, 8p |
| Databáze: | Complementary Index |
| Externí odkaz: |
|