Temperature measurements of semiconductor wafers via a laser thermometer with fiber optic communication line.
| Autor: | Lukin, O. V., Magunov, Alexander N. |
|---|---|
| Zdroj: | Proceedings of SPIE; 11/ 1/1994, Issue 1, p439-442, 4p |
| Databáze: | Complementary Index |
| Externí odkaz: |
|