Thick PMMA layer formation as an x-ray imaging medium for micromachining.
| Autor: | Vladimirsky, Olga, Calderon, Gina M., Vladimirsky, Yuli, Manohara, Harish M. |
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| Zdroj: | Proceedings of SPIE; Nov1996, Issue 1, p360-371, 12p |
| Databáze: | Complementary Index |
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