Contrast-boosted resist using a polarity-change reaction during aqueous base development.
| Autor: | Uchino, Shou-ichi, Ueno, Takumi, Migitaka, Sonoko, Yamamoto, Jiro, Tanaka, Toshihiko P., Murai, Fumio, Shiraishi, Hiroshi, Hashimoto, Michiaki |
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| Zdroj: | Proceedings of SPIE; Nov1996, Issue 1, p438-447, 10p |
| Databáze: | Complementary Index |
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