Selectively esterified novolac resins: a study of resist properties as a function of novolac molecular weight and composition.

Autor:	Jeffries III, Alfred T., Brzozowy, David J., Beauchemin Jr., Bernard T., Naiini, Ahmad A., Fitzgerald, Edward A., Gallagher-Wetmore, Paula M.
Zdroj:	Proceedings of SPIE; Nov1996, Issue 1, p469-480, 12p
Databáze:	Complementary Index
Externí odkaz:	Zobrazit plný text záznamu