Selectively esterified novolac resins: a study of resist properties as a function of novolac molecular weight and composition.
Autor: | Jeffries III, Alfred T., Brzozowy, David J., Beauchemin Jr., Bernard T., Naiini, Ahmad A., Fitzgerald, Edward A., Gallagher-Wetmore, Paula M. |
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Zdroj: | Proceedings of SPIE; Nov1996, Issue 1, p469-480, 12p |
Databáze: | Complementary Index |
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