New process for resist removal after lithography process using adhesive tape.
| Autor: | Kubozono, Tatsuya, Moroishi, Yutaka, Ohta, Yoshio, Shimodan, Hideaki, Moriuchi, Noboru |
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| Zdroj: | Proceedings of SPIE; Nov1996, Issue 1, p677-689, 13p |
| Databáze: | Complementary Index |
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